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Research Activity

Field of Study

X-ray Stress Measurement

Subject of Study

Residual stress measurement in nitride semiconductor films by using X-ray diffraction (residual stress, X-ray diffraction, sputtering, nitride semiconductor films)

Book / Paper

Academic Paper (Judged Full Paper):

1.Kazuya Kusaka, Yutaka Maruoka and Tatsuya Matsue :
Residual stress and bending strength of ZnO films deposited on polyimide sheet by RF sputtering system,
Journal of Vacuum Science & Technology A, Vol.34, No.3, 031507-1-031507-4, 2016.
(DOI: 10.1116/1.4944610)
2.Ming Cai, Hitoshi Takagi, Antonio Norio Nakagaito, Kazuya Kusaka, Masahiro Katoh and Yan Li :
Influence of alkali concentration on morphology and tensile properties of abaca fibers,
Advanced Materials Research, Vol.1110, 302-305, 2015.
(DOI: 10.4028/www.scientific.net/AMR.1110.302)
3.Kazuya Kusaka and Yuma Yamada :
The Relationship between Hillock Formation Temperature and Initial Residual Stress in Copper Thin Films with Different Crystal Grain Size,
Journal of the Society of Materials Science, Japan, Vol.62, No.7, 457-463, 2013.
(DOI: 10.2472/jsms.62.457,   CiNii: 130003367199)
4.Manabu Yasuoka, Pangpang Wang, Kaiyue Zhang, Zhiyong Qiu, Kazuya Kusaka, Young-Shik Pyoun and Ri-ichi Murakami :
Improvement of the fatigue strength of SUS304 austenite stainless steel using ultrasonic nanocrystal surface modification,
Surface & Coatings Technology, Vol.218, 93-98, 2013.
(DOI: 10.1016/j.surfcoat.2012.12.033,   Elsevier: Scopus)
5.Mitsuhiko Shinohara, Takao Hanabusa and Kazuya Kusaka :
Residual Stress Development in Cu Thin Films with and without AlN Passivation by Cyclic Plane Bending,
International Journal of Modern Physics B, Vol.24, No.15,16, 2530-2536, 2010.
(DOI: 10.1142/S0217979210065210)
6.Ayumi Shiro, Takao Hanabusa, Tatsuya Okada, Masayuki Nishida, Kazuya Kusaka and Osami Sakata :
Measurement of Micro Residual Stresses near the Grain Boundary in Copper Bicrystal,
Advanced Materials Research, Vol.89-91, 515-520, 2010.
(DOI: 10.4028/www.scientific.net/AMR.89-91.515)
7.Kikuo Tominaga, Kenji Okada, Yoshinori Miyamoto, Shinya Ohkura, Kazuya Kusaka, Kentaro Shiraishi, Takahiro Ueno and Takao Hanabusa :
Deposition of photocatalytic TiO2 films by planar magnetron sputtering system with opposed Ti targets,
e-Journal of Surface Science and Nanotechnology, Vol.7, 290-293, 2009.
(DOI: 10.1380/ejssnt.2009.290,   Elsevier: Scopus)
8.Kazuya Kusaka, Takao Hanabusa, Shoso Shingubara, Tatsuya Matsue and Osami Sakata :
Measurement of electromigration-induced stress in aluminum alloy interconnection,
Vacuum, Vol.83, No.3, 637-640, 2009.
(DOI: 10.1016/j.vacuum.2008.04.041)
9.Tatsuya Matsue, Takao Hanabusa, Kazuya Kusaka and Osami Sakata :
Effect of heating on the residual stresses in TiN films investigated using synchrotron radiation,
Vacuum, Vol.83, No.3, 585-588, 2009.
(DOI: 10.1016/j.vacuum.2008.04.068)
10.Kazuya Kusaka, Takao Hanabusa, Kenta Kaneko, Tatsuya Matsue and Osami Sakata :
In-situ Thermal Stress Measurement in Multi-layered Aluminum Nitride and Copper Films by Synchrotron Radiation,
Transactions of The Japan Society of Mechanical Engineers, Series A, Vol.74, No.739, 363-369, 2008.
(DOI: 10.1299/kikaia.74.363,   CiNii: 110006643459,   Elsevier: Scopus)
11.Takao Hanabusa, Kazuya Kusaka, Kenta Kaneko, Osami Sakata and Masayuki Nishida :
Stress-assisted atomic migration in thin copper films,
Key Engineering Materials, Vol.353-358, 671-674, 2007.
(DOI: 10.4028/www.scientific.net/KEM.353-358.671,   Elsevier: Scopus)
12.Tatsuya Matsue, Takao Hanabusa, Yasukazu Ikeuchi, Kazuya Kusaka and Osami Sakata :
Alteration of internal stresses in SiO2/Cu/TiN thin films by X-ray and synchrotron radiation due to heat treatment,
Vacuum, Vol.80, No.7, 836-839, 2006.
(DOI: 10.1016/j.vacuum.2005.11.033,   Elsevier: Scopus)
13.Takao Hanabusa, Kazuya Kusaka, Shoso Shingubara and Osami Sakata :
Thermal stress behavior in nano-size thin aluminum films,
International Journal of Modern Physics B, Vol.20, No.25n27, 4691-4696, 2006.
(DOI: 10.1142/S0217979206041902,   Elsevier: Scopus)
14.Kazuya Kusaka, Takeshi Tanaka and Takao Hanabusa :
Effect of Laser Power Density and Scanning Speed on Residual Stress in Laser-Peened Aluminum Alloy,
Journal of the Society of Materials Science, Japan, Vol.54, No.7, 672-678, 2005.
(DOI: 10.2472/jsms.54.672,   CiNii: 110006266558)
15.Satoshi Kiriyama, Kazuya Kusaka and Takao Hanabusa :
動き始めた創成学習,
大学研究ジャーナル, 95-106, 2005.
16.Mitsuhiko Hataya, Takao Hanabusa, Kazuya Kusaka, Kikuo Tominaga and Tatsuya Matsue :
Residual stress measurement in sputtered copper thin films by synchrotron radiation and ordinary X-rays,
Materials Science Forum, Vol.490-491, 661-668, 2005.
(DOI: 10.4028/www.scientific.net/MSF.490-491.661,   Elsevier: Scopus)
17.Kazuya Kusaka, Takao Hanabusa, Kikuo Tominaga and Noriyoshi Yamauchi :
Effect of substrate temperature on crystal orientation and residual stress in RF sputtered galium nitride films,
Materials Science Forum, Vol.490-491, 613-618, 2005.
(DOI: 10.4028/www.scientific.net/MSF.490-491.613,   Elsevier: Scopus)
18.Takao Hanabusa, Kazuya Kusaka, Shozo Shingubara and Osami Sakata :
In-situ observation of thermal stress in nano-size thin aluminum films,
Materials Science Forum, Vol.490-491, 577-582, 2005.
(DOI: 10.4028/www.scientific.net/MSF.490-491.577,   Elsevier: Scopus)
19.Takao Hanabusa, Kazuhiro Miyagi and Kazuya Kusaka :
X-ray elastic constants of chromium nitride films deposited by arc-ion plating,
Journal of Vacuum Science & Technology A, Vol.A22, No.4, 1785-1787, 2004.
(DOI: 10.1116/1.1705648)
20.Kazuya Kusaka, Takao Hanabusa, Kikuo Tominaga and Noriyoshi Yamauchi :
Effect of Substrate Temperature on Crystal Orientation and Residual Stress in Radio Frequency Sputtered Gallium-Nitride Films,
Journal of Vacuum Science & Technology A, Vol.22, No.4, 1587-1590, 2004.
(DOI: 10.1116/1.1759348)
21.Akira Oyama, Hitoshi Takagi, Kazuya Kusaka and Keitaro Horikawa :
The Content and Effects of Machine Creation Laboratory Using Lego Mindstorms,
Journal of Japanese Society for Engineering Education, Vol.52, No.4, 20-24, 2004.
(DOI: 10.4307/jsee.52.4_20,   CiNii: 10013326361)
22.Takao Hanabusa, Kazuya Kusaka, Tatsuya Matsue, Masayuki Nishida, Osami Sakata and Toshiki Sato :
Evaluation of Internal Stresses in Single-, Double- and Multi-Layered TiN and TiAlN Thin Films by Synchrotron Radiation,
JSME International Journal, Series A: Solid Mechanics and Material Engineering, Vol.47, No.3, 312-317, 2004.
(DOI: 10.1299/jsmea.47.312,   CiNii: 110004820491)
23.Takao Hanabusa, Kazuya Kusaka and Osami Sakata :
Residual stress and thermal stress observation in thin copper films,
Thin Solid Films, Vol.459, No.1-2, 245-248, 2004.
(DOI: 10.1016/j.tsf.2003.12.102,   Elsevier: Scopus)
24.Takao Hanabusa, Kazuya Kusaka, Tatsuya Matsue, Masayuki Nishida, Osami Sakata and Toshiki Sato :
Evaluation of internal stresses in TiN thin films by synchrotron radiation,
Vacuum, Vol.74, No.3-4, 571-575, 2004.
(DOI: 10.1016/j.vacuum.2004.01.029)
25.Kazuya Kusaka, Takao Hanabusa and Kikuo Tominaga :
Measurement of crystal orientation and residual stress in GaN film deposited by RF sputtering with powder target,
Vacuum, Vol.74, No.3-4, 613-618, 2004.
(DOI: 10.1016/j.vacuum.2004.01.034)
26.Takao Hanabusa and Kazuya Kusaka :
Presentation Assessment of Activities in Graduation Research and Its Development,
Journal of Japanese Society for Engineering Education, Vol.51, No.5, 42-50, 2003.
(DOI: 10.4307/jsee.51.5_42,   CiNii: 10011713826)
27.Tatsuya Matsue, Takao Hanabusa, Yasukazu Ikeuchi and Kazuya Kusaka :
X-Ray Evaluation of SiO2/Cu/TiN Films Deposited by Ion Plating,
Journal of the Society of Materials Science, Japan, Vol.52, No.10, 1231-1236, 2003.
(DOI: 10.2472/jsms.52.1231,   Elsevier: Scopus)
28.Takao Hanabusa, Kazuya Kusaka, Masayuki Nishida, Tatsuya Matsue and Osami Sakata :
Crystal orientation and residual stress in TiN film by synchrotron radiation,
Zeitschrift für Metallkunde, Vol.94, No.6, 662-666, 2003.
(Elsevier: Scopus)
29.Kazuya Kusaka, Kouhei Furutani, Takuya Kikuma, Takao Hanabusa and Kikuo Tominaga :
Effect of Plasma Protection Net on Crystal Orientation and Residual Stress in Sputtered Gallium Nitride Films,
Materials Science Research International, Vol.8, No.4, 187-192, 2002.
(DOI: 10.2472/jsms.51.12Appendix_187,   CiNii: 110002284000,   Elsevier: Scopus)
30.Takao Hanabusa and Kazuya Kusaka :
A new trial of outcomes assesment based on presentation practice,
Journal of Japanese Society for Engineering Education, Vol.50, No.5, 47-53, 2002.
(DOI: 10.4307/jsee.50.5_47,   CiNii: 10009987574)
31.Kazuya Kusaka, Daisuke Taniguchi, Takao Hanabusa and Kikuo Tominaga :
Effect of sputtering gas pressure and nitrogen concentration on crystal orientation and residual stress in sputtered AlN films,
Vacuum, Vol.66, No.3-4, 441-446, 2002.
(DOI: 10.1016/S0042-207X(02)00168-9,   Elsevier: Scopus)
32.Takuya Kikuma, Kikuo Tominaga, Kazuo Furutani, Kazuya Kusaka, Takao Hanabusa and Takashi Mukai :
GaN films deposited by planar magnetron sputtering,
Vacuum, Vol.66, No.3-4, 233-237, 2002.
(DOI: 10.1016/S0042-207X(02)00147-1)
33.Kikuo Tominaga, Takuya Kikuma, Kazuya Kusaka and Takao Hanabusa :
Energetic oxygen ions in ZrO2 deposition by reactive sputtering of Zr,
Vacuum, Vol.66, No.3-4, 279-284, 2002.
(DOI: 10.1016/S0042-207X(02)00155-0)
34.Kazuya Kusaka, Hiroyuki Ukida and Shigeki Matsuo :
Evaluation of Technique to Improve Pre-Design Ability and Presentation Skills,
Journal of Japanese Society for Engineering Education, Vol.50, No.3, 98-103, 2002.
(DOI: 10.4307/jsee.50.3_98,   CiNii: 10009987329)
35.Takao Hanabusa, 森口 忠和, Kazuya Kusaka and Tatsuya Matsue :
Development of Thick TiN Film on Aluminum Substrate and Its Wear Properties,
Journal of the Society of Materials Science, Japan, Vol.50, No.7, 732-737, 2001.
(DOI: 10.2472/jsms.50.732,   CiNii: 110002292628,   Elsevier: Scopus)
36.Kazuya Kusaka and Takao Hanabusa :
Crystal Orientation and Residual Stress in Chromium Nitride Films Deposited by Arc-Ion Plating,
Materials Science Research International, Special Technical Publication, Vol.1, 299-302, 2001.
37.Makoto Nisiike, Takao Hanabusa and Kazuya Kusaka :
X-Ray Evaluation of Laser-Peened Aluminum Surface,
Materials Science Research International, Special Technical Publication, Vol.1, 285-290, 2001.
38.Yasuhiro Miki, Tadashi Taniguchi, Takao Hanabusa, Kazuya Kusaka and Tatsuya Matsue :
X-ray Stress Measurement and Mechanical Properties of TiN Films Coated on Aluminum and Aluminum Alloy Substrates by Arc Ion Plating and Ion Beam Mixing,
Materials Science Research International, Vol.6, No.4, 243-248, 2000.
(Elsevier: Scopus)
39.Kazuya Kusaka, Daisuke Taniguchi, Takao Hanabusa and Kikuo Tominaga :
Effect of Input Power on Crystal Orientation and Residual Stress in AlN Film Deposited by dc Sputtering,
Vacuum, Vol.59, No.2-3, 806-813, 2000.
(DOI: 10.1016/S0042-207X(00)00351-1,   Elsevier: Scopus)
40.Tatsuya Matsue, Takao Hanabusa, Yasuhiro Miki, Kazuya Kusaka and Eiji Maitani :
Residual Stress in TiN Film Deposited by Arc Ion Plating,
Thin Solid Films, Vol.343-344, 257-260, 1999.
41.Takao Hanabusa, Hiroyosi Hosoda, Kazuya Kusaka and Kikuo Tominaga :
Abnormal Residual Stress State in ZnO Films Synthesized by Planar Magnetron Sputtering System with Two Facing Targets,
Thin Solid Films, Vol.343-344, 164-167, 1999.
42.Yasuhiro Miki, Tadasi Taniguchi, Kazuya Kusaka, Takao Hanabusa and Eiji Maitani :
Mechanical Properties of TiN Films Deposited on Aluminum Substrates by Arc Ion Plating Method,
Transactions of The Japan Society of Mechanical Engineers, Series A, Vol.65, No.635, 1635-1641, 1999.
43.Kazuya Kusaka, Takahiro Ao, Takao Hanabusa and Kikuo Tominaga :
Effect of External Magnetic Field on c-axis Orientation and Residual Stress in AlN Films,
Thin Solid Films, Vol.332, No.1-2, 247-251, 1998.
44.Kikuo Tominaga, Yoshifumi Sato, Ichiro Mori, Kazuya Kusaka and Takao Hanabusa :
Influence of target shape on properties of AlN sputtered film,
Japanese Journal of Applied Physics, Part 1 (Regular Papers & Short Notes), Vol.37, 5224-5226, 1998.
45.Kikuo Tominaga, Takahiro Ao, Yoshifumi Sato, Ichiro Mori, Kazuya Kusaka and Takao Hanabusa :
Magnetic Field Dependence of AlN Films in DC Planar Magnetron Sputtering with Opposed Targets,
Vacuum, Vol.51, No.4, 549-553, 1998.
46.Kazuya Kusaka, Takao Hanabusa, Kikuo Tominaga and Takahiro Ao :
Residual Stress Measurement in AlN Film Deposited by Alternating Sputtering Method,
Journal of the Society of Materials Science, Japan, Vol.46, No.12, 1429-1435, 1997.
47.Kazuya Kusaka, Takao Hanabusa and Kikuo Tominaga :
Effect of Plasma Protection Net on Residual Stress in AlN Films Deposited by a Magnetron Sputtering System,
Thin Solid Films, Vol.290-291, 260-263, 1996.
48.Kazuya Kusaka, Takao Hanabusa, Masayuki Nishida and Fukuji Inoko :
Residual Stress and in-situ Thermal Stress Measurement of Aluminum Film Deposited on Silicon Wafer,
Thin Solid Films, Vol.290-291, 248-253, 1996.
49.Kikuo Tominaga, Takahir Ao, Ichirou Mori, Kazuya Kusaka and Takao Hanabusa :
Gas pressure dependence of AlN film properties in alternating sputtering system,
Japanese Journal of Applied Physics, Part 1 (Regular Papers & Short Notes), Vol.35, No.9B, 4972-4975, 1996.
50.Kazuya Kusaka, Takao Hanabusa and Kikuo Tominaga :
Effect of Nitrogen Gas Pressure on Residual Stress in AlN Films Deposited by the Planar Magnetron Sputtering System,
Thin Solid Films, Vol.281-282, 340-343, 1996.
51.Kikuo Tominaga, Shozo Inoue, R.P. Howson, Kazuya Kusaka and Takao Hanabusa :
TiN films prepared by unbalanced planar magnetron sputtering under controle of photoemission of Ti,
Thin Solid Films, Vol.281-282, 182-185, 1996.
52.Shozo Inoue, Kikuo Tominaga, Ronald P Howson and Kazuya Kusaka :
Effects of Nitrogen Pressure and Ion Flux on the Properties of Direct Current Reactive Magnetron Sputtered Zr-N Films,
Journal of Vacuum Science & Technology A, Vol.A13, No.6, 2808-2813, 1995.
53.Kikuo Tominaga, Kazuya Kusaka, Mufei Chong, Takao Hanabusa and Yoshihiro Shintani :
Film Degradation in AlN Preparation by Facing Target System,
Japanese Journal of Applied Physics, Part 1 (Regular Papers & Short Notes), Vol.33, No.9B, 5235-5239, 1994.
54.Kazuya Kusaka, Takao Hanabusa and Kikuo Tominaga :
Effects of Plasma Contamination on Crystal Orientation and Residual Stress in AlN Films Deposited by Planar Magnetron Sputtering,
Journal of the Society of Materials Science, Japan, Vol.43, No.490, 799-805, 1994.
55.Takao Hanabusa, Kazuya Kusaka, Kikuo Tominaga and Haruo Fujiwara :
Dependence of Substrate and Its Temperature on Residual Stress in AlN Films Deposited by Sputtering,
Journal of the Society of Materials Science, Japan, Vol.42, No.477, 627-633, 1993.

Academic Paper (Unrefereed Paper):

1.Takao Hanabusa and Kazuya Kusaka :
TiNおよびTiAlN膜の応力のX線的評価,
リガクジャーナル, Vol.35, No.2, 20-27, 2004.
2.Takao Hanabusa, Kazuya Kusaka, 新宮原 正三, 坂田 修身 and 松英 達也 :
ナノサイズアルミニウム配線のエレクトロニクスマイグレーション誘起応力の挙動,
SPring-8ナノテクノロジー研究, Vol.2 2003A, 10-12, 2003.

Academic Letter:

1.Hitoshi Takagi, Antonio Norio Nakagaito, Kazuya Kusaka and Yuya Muneta :
Development of green nanocomposites reinforced by cellulose nanofibers extracted from paper sludge,
Modern Physics Letters. B, Vol.29, No.06n07, 1540025_1-1540025_5, 2015.
(DOI: 10.1142/S0217984915400254,   Elsevier: Scopus)

Review, Commentary:

1.桐山 聰, Kazuya Kusaka, Takao Hanabusa and 辛 動勲 :
Innovative and Creative Learning Activities have started off : The Activity of the Center for Innovation and Creativity Development,
Journal of University Education Research, Vol.2, No.2, 113-124, Mar. 2005.
(CiNii: 110006828065)
2.Kenji Suzuki and Kazuya Kusaka :
The Fundamental Principles and Techniques of X-Ray Stress Measurement and Current in the Field - 5: Application to Advanced Materials,
Journal of the Society of Materials Science, Japan, Vol.48, No.3, 308-314, Mar. 1999.

Proceeding of International Conference:

1.Kazuya Kusaka, Yutaka Maruoka and Tatsuya Matsue :
Residual stress and bending strength of ZnO films deposited on polyimide sheet by rf sputtering system,
The 13th international symposium on sputtering & plasma prosesses, 407-410, Jul. 2015.
2.Ming Cai, Hitoshi Takagi, Antonio Norio Nakagaito, Kazuya Kusaka, Masahiro Katoh and Yang Li :
Influence of alkali concentration on morphology and tensile properties of abaca fibers,
Program and Abstract Book for 7th International Conference AMDP 2014, 136, Busan, Jul. 2014.
3.Hitoshi Takagi, Antonio Norio Nakagaito, Kazuya Kusaka and Yuya Muneta :
Development of nanocomposites reinforced by cellulose fibers from paper sludge,
Program and Abstract Book for 7th International Conference AMDP 2014, 64, Busan, Jul. 2014.
4.Ming Cai, Hitoshi Takagi, Antonio Norio Nakagaito, Kazuya Kusaka, Masahiro Katoh and Yan Li :
Effects of alkali treatment on microstructure and tensile properties of abaca fiber,
Proceedings of the SAMPE CHINA 2013, S5-6_1-S5-6_4, Shanghai, Oct. 2013.
5.Kazuya Kusaka and Kikuo Tominaga :
Residual stress measurement in metal interlayer of metal-ceramics functionally graded thin film,
Proceedings of the twelfth international symposium on sputtering & plasma processes, 142-145, Kyoto, Jul. 2013.
6.Bistamam Shahril Amin Mohd, Hitoshi Takagi, Antonio Norio Nakagaito, Masahiro Katoh, Kazuya Kusaka and Jitendra Kumar Pandey :
Development of green nanocomposites reinforced by cellulose nanofibers from waste newspaper,
Proceedings of the Ninth Joint Canada-Japan Workshop on Composites, J21_1-J21_8, Kyoto, Jul. 2012.
7.Norihisa Shimamura, Kosuke Harada, Shingo Kuno, Shinsuke Nakanishi, Takahumi Nakagawa, Satoshi Nishino, Takao Hanabusa, Shoichiro Fujisawa and Kazuya Kusaka :
Activity of Tatara Project,
Proceedings of Asian Conference on Engineering Education 2009 (ACEE2009), 213-214, Busan, Oct. 2009.
8.Shinohara Mitsuhiko, Takao Hanabusa and Kazuya Kusaka :
Residual stress development in Cu thin films with and without AlN passivation by cyclic plane bending,
AMDP 2008 Program & Abstract Book, 93, Beijing, China, Oct. 2008.
9.Isoda Hirokazu, Kazuya Kusaka and Takao Hanabusa :
Evaluation of residual stresses induced by laser peening,
AMDP 2008 Program & Abstract Book, 92, Beijing, China, Oct. 2008.
10.Takao Hanabusa, Kazuya Kusaka and Nishida Masayuki :
Diffraction stress measurement on coarse graind materials,
The 8th International Conference on Residual Stresses, Denver, USA, Aug. 2008.
11.Okada Kenji, Kikuo Tominaga, Retsuo Kawakami, Ohkura Shinya, Kazuya Kusaka and Takao Hanabusa :
Deposition of photocatalytic tiO2 films by planar magnetron sputtering system with opposed Ti targets,
14th International Conference on Solid Films and Surfaces, 331-332, Dublin, Jul. 2008.
12.Takao Hanabusa, Masayuki Nishida and Kazuya Kusaka :
Thermal stress behavior of micro- and nano-size aluminum films,
International Conference on Neutron and X-ray Scattering 2007, 21-27, Bandung, Indonesia, Jul. 2007.
13.Kikuo Tominaga, Miyamoto Yoshinori, Ohkura Shinya, Kazuya Kusaka and Takao Hanabusa :
Comparison of film depositions of anatase TiO2 by planar magnetron sputtering with opposed Ti targets and conventional Ti targets,
The 20th Symposium on Plasma Science for Materials, 108, Nagoya, Jun. 2007.
14.Kazuya Kusaka, Takao Hanabusa, Shingubara Shoso, Tatsuya Matsue and Osami Sakata :
Measurement of electromigration-induced stress in aluminum interconnection,
Proceedings of the Ninth International Symposium on Sputtering and Plasma Process, 411-414, Kanazawa, Jun. 2007.
15.Takao Hanabusa and Kazuya Kusaka :
Stress Assisted Atomic Migration in Copper Thin Films,
Proceedings of the Ninth International Symposium on Sputtering and Plasma Process, 229-232, Kanazawa, Jun. 2007.
16.Tatsuya Matsue, Takao Hanabusa, Kazuya Kusaka and Osami Sakata :
Alteration of Residual Stresses in TiN Films by Synchrotron Radiation due to Heat Treatment,
Proceedings of the Ninth International Symposium on Sputtering and Plasma Process, 127-130, Kanazawa, Jun. 2007.
17.Takao Hanabusa, Kazuya Kusaka and Masayuki Nishida :
Stress-assisted atomic migration in thin copper films,
APCFS'06, 22-25, Hainan Iland, China, Nov. 2006.
18.Takao Hanabusa and Kazuya Kusaka :
Encouragement of student activities by presentation evaluation,
Proceeding of the 34th SEFI Annual Conference, 109, Uppsala, Sweden, June 2006, Jun. 2006.
19.Kazuya Kusaka, Takao Hanabusa, Satoshi Kiriyama, Tetsushi Ueta, Akio Tsuneda and Takuo Nagamachi :
Mutual evaluation of presentation skills between two distant universities by giga-bit network,
Abstract of 6th Asian-Pacific Conference on PBL, 79, Tokyo, May 2006.
20.Satoshi Kiriyama, Ikeda Yuuichi, Kazuya Kusaka, Masanobu Haraguchi and Takao Hanabusa :
The Good Result of Independent Project Activities by Students and the New prospect of Creativity Education,
Proceedings of The 1st International Conference Design Engineering and Science (Proc. of ICDES2005), 369-373, Wien, Oct. 2005.
21.Tatsuya Matsue, Takao Hanabusa, Yasukazu Ikeuchi, Kazuya Kusaka and Osami Sakata :
Alteration of internal stresses in SiO2/Cu/TiN thin films by synchrotron radiation due to heat treatment,
The 8th International Symposium on Sputtering and Plasma Processes, Kanazawa, Japan, Jun. 2005.
22.Kazuya Kusaka, Takao Hanabusa, Shoso Shingubara, Tatsuya Matsue and K. Ohshima :
Behavior of electromigration-induced stress in nano-sized aluminum interconection,
The 8th International Symposium on Sputterring and Plasma Processes, Kanazawa, Japan, Jun. 2005.
23.Takao Hanabusa, Kazuya Kusaka, Shoso Shingubara and Osami Sakata :
Thermal stress behavior in nano-size thin aluminum films,
Advanced Materials Development & Performance Conference 2005, 157, Auckland, New Zealand, Jun. 2005.
24.Kazuya Kusaka, Takao Hanabusa, Shoso Shingubara, K. Noda and K. Oshima :

The 8th International Sympsium on Sputtering & Plasm Processes, MN-P-3, Kanazawa, Jun. 2005.
25.Tatsuya Matsue, Takao Hanabusa, Yasukazu Ikeuchi, Kazuya Kusaka and Osami Sakata :
Alteration of internal stresses in SiO2/Cu/TiN thin films by synchrotron radiation due to heat treatment,
The 8th International Symposium on Sputtering & Plasma Processes, TF-P1-13, Kanazawa, Jun. 2005.
26.Takao Hanabusa, Kazuya Kusaka, Shoso Shingubara and Osami Sakata :
In-situ observation of thermal stress in nano-size thin aluminum films,
The Seventh International Conference on Residual Stresses, Xi'an, China, Jul. 2004.
27.Takao Hanabusa, Kazuya Kusaka, Shoso Shingubara and Osami Sakata :
In-situ Thermal Stress Measurement of Thin Films During Thermal Cycling,
Proceedings of 4th International Forum on Advanced Materila Science and Technology, Troyes([France]), Jul. 2004.
28.Takao Hanabusa, Kazuya Kusaka, Shoso Shingubara and Osami Sakata :
In-situ Observation of Thermal Stress in Nano-size Thin Films,
Proceedings of 16th International Vacuum Congress, Venice([Italy]), Jun. 2004.
29.Kazuya Kusaka, Takao Hanabusa, Shoso Shingubara, Tatsuya Matsue and Osami Sakata :
In-situ thermal stress measurement in nano-sized aluminum and copper films with SOG passivation,
AIP Conference Proceedings of Stress-induced Phenomena in Metallization, Vol.741, 229-235, Austin([USA]), Jun. 2004.
30.Mitsuhiko Hataya, Takao Hanabusa, Kazuya Kusaka, Kikuo Tominaga, Tatsuya Matsue and Osami Sakata :
Residual Stress Measurement in Sputtered Copper Thin Films by Synchrotron Radiation and Ordinary X-rays,
Proceedings of the 7th International Conference on Residual Stresses, 661-666, Xi'an, Jun. 2004.
31.Kazuya Kusaka, Takao Hanabusa, Kikuo Tominaga and Noriyoshi Yamauchi :
Effect of Substrate Temperature on Crystal Orientation and Residual Stress in RF Sputtered Gallium Nitride Films,
Proceedings of the 7th International Conference on Residual Stresses, 613-618, Xi'an, Jun. 2004.
32.Dongying Ju, Tomio Ueda, Takashi Hatakeyama, Takuya Arizono, Kazuya Kusaka and Takao Hanabusa :
Evaluation of Residual Stress in Nano-TiO2 Film on ITO Glass by Synchrotron X-Ray Diffraction,
Proceedings of the 7th International Conference on Residual Stresses, Xi'an, Jun. 2004.
33.Takao Hanabusa, Kazuya Kusaka, Shoso Shingubara and Osami Sakata :
In-situ Observation of Thermal Stress in Nano-size Thin Aluminum Films,
Proceedings of the 7th International Conference on Residual Stresses, Xi'an, Jun. 2004.
34.Takao Hanabusa, Kazuya Kusaka, Shoso Shingubara and Osami Sakata :
In-situ observation of thermal stress in nano-size thin films,
16th International vacuum congress, Venice, Italy, 2004.
35.Takao Hanabusa, Kazuya Kusaka, Shoso Shingubara and Osami Sakata :
In-situ thermal stress measurement of thin films during thermal cycling,
4th International forum on advanced materials science and technology, Troyes, France, 2004.
36.Kazuya Kusaka, Takao Hanabusa and Kikuo Tominaga :
Measurement of Crystal Orientation and Residual Stress in GaN Film Deposited by RF Sputtering with Powder Target,
Proceedings of the Seventh International Symposium on Sputtering and Plasma Process, 157-160, Kanazawa, Jun. 2003.
37.Kikuo Tominaga, Takuya Kikuma, Kazuya Kusaka and Takao Hanabusa :
Energetic oxygen ions in ZrO2 deposition by reactive sputtering of Zr,
Proc. 6th International Symposium on Sputtering &Plasma Processes, 434-437, Kanazawa, Jun. 2001.
38.Takao Hanabusa, Yasuhiro Miki, Tatsuya Matsue and Kazuya Kusaka :
The Effect of Residual Stresses on the Wear Behavior of TiN Films on Aluminum Substrates,
Proceedings of the Sixth International Conference on Residual Stresses, Vol.2, 827-834, Oxford, United Kingdom, Jul. 2000.
39.Kazuya Kusaka, Takao Hanabusa and Kikuo Tominaga :
Relationship between Grain Size and Residual Stress in AlN Sputtered Film,
Proceedings of the Sixth International Conference on Residual Stresses, Vol.1, 391-398, Oxford, United Kingdom, Jul. 2000.
40.Kikuo Tominaga, Yoshifumi Sato, Ichiro Mori, Kouhei Furutani, Kazuya Kusaka and Takao Hanabusa :
InN film deposition by planar magnetron sputtering,
Proceedings of the Second International Conference on Advanced Materials Development & Performance Evaluation and Application, 474-477, Tokushima, Nov. 1999.
41.Kazuya Kusaka, Daisike Taniguchi, Takao Hanabusa and Kikuo Tominaga :
Effect of Sputtering Power on Residual Stress in AlN Film Deposited by d.c. Sputtering,
Proceedings of the Second International Conference on Advanced Materials Development and Performance Evaluation and Application, 223-228, Tokushima, Nov. 1999.
42.Takeshi Sugiyama, Masayuki Nishida, Takao Hanabusa and Kazuya Kusaka :
FEM Examination of Triaxiality on X-ray Stress Measurement,
Proceedings of the Second International Conference on Advanced Materials Development and Performance Evaluation and Application, 895-899, Tokushima, Nov. 1999.
43.Kouhei Furutani, Bujang Lieng Anak John, Kazuya Kusaka, Takao Hanabusa and Kikuo Tominaga :
Effect of Depositing Time and Sputtering Power on Residual Stress in InN Films Deposited by RF Sputtering,
Proceedings of the Second International Conference on Advanced Materials Development and Performance Evaluation and Application, 887-890, Tokushima, Nov. 1999.
44.Kunihiko Hashimoto, Kazuya Kusaka and Takao Hanabusa :
X-ray Stress Measurement of Sintered Steel, --- A Simulation of Japanease Sword ---,
Proceedings of the Second International Conference on Advanced Materials Development and Performance Evaluation and Application, 891-894, Tokushima, Nov. 1999.
45.Daisike Taniguchi, Kazuya Kusaka, Takao Hanabusa and Kikuo Tominaga :
Effect of Sputtering Power on Residual Stress in AlN Films Deposited by rf Sputtering,
Proceedings of the Second International Conference on Advanced Materials Development and Performance Evaluation and Application, 883-886, Tokushima, Nov. 1999.
46.Kazuya Kusaka, Takao Hanabusa, Kikuo Tominaga and Takahiro Ao :
Effect of External Magnetic Field on Residual Stress in AlN Films Prepared by Sputtering System,
Proceedings of the Second International Conference on Nitride Semiconductors, 378, Tokushima, Oct. 1997.
47.Takao Hanabusa, Kazuya Kusaka and Masayuki Nishida :
Development of Thermal Stress in Aluminum Film on Silicon Substrate,
Proceedings of the First International Conference on Advanced Materials Development and Performance Evaluation and Application, 268-273, Auckland, Jul. 1997.
48.Kazuya Kusaka, Takao Hanabusa and Kikuo Tominaga :
Effect of Nitrogen Gas Pressure on Residual Stress in AlN Films Deposited by Planar Magnetron Sputtering System,
Proceedings of the First International Conference on Advanced Materials Development and Performance Evaluation and Application, 310-315, Auckland, Jul. 1997.
49.Kazuya Kusaka, Takao Hanabusa, Kikuo Tominaga and Takahiro Ao :
Effect of Partial Nitrogen Gas Pressure on Residual Stress in AlN Films Prepared by Sputtering System,
Proceedings of the Fifth International Conference on Residual Stresses, 1048-1053, Linkoeping, Sweden, Jun. 1997.
50.Takao Hanabusa, Kazuya Kusaka, Masayuki Nishida and Fukuji Inoko :
In-situ Thermal Stress Measurement and Observation of Void and Hillock Formation of Aluminum Film,
Proceedings of the Fifth International Conference on Residual Stresses, Vol.2, 854-861, Linkoeping, Sweden, Jun. 1997.
51.Kikuo Tominaga, Takahiro Ao, Yoshifumi Sato, Kazuya Kusaka and Takao Hanabusa :
Magnetic field dependence of AlN film properties in DC facing target sputtering,
4th International symposium on sputtering & plasma processes, 129-133, Kanazawa, Jun. 1997.
52.Kazuya Kusaka, Takao Hanabusa and Kikuo Tominaga :
Effects of Substrate Temperature and Successive Annealing on Residual Stress in AlN Films Dposited by Sputtering,
Proceedings of the First International Symposium on Thermal Stresses and Related Topics, 599-602, Hamamatsu, Jun. 1995.
53.Takao Hanabusa, Kazuya Kusaka and Kikuo Tominaga :
Residual Stress in Aluminum Nitride Films Deposited on Glass Substrate by Magnetron Sputtering Method,
Proceedings of the Fourth International Conference on Residual Stresses, 631-639, Baltimore, Maryland, USA, Jun. 1994.
54.Takao Hanabusa, Kazuya Kusaka, Kikuo Tominaga and Haruo Fujiwara :
Dependence of Substrate and Its Temperature on Residual Sress Development in AlN Films Deposited on Glasses by Magnetron Sputtering Method,
Proceedings of International Symposium on Nondestructive Testing & Stress-Strain Measurement, 516-523, Tokyo, Oct. 1992.

Proceeding of Domestic Conference:

1.Kenta Shirasaka, Kazuya Kusaka, Daisuke Yonekura and Yuta Tanaka :
二種類の基板上に堆積したCrN単層膜およびCr/CrN多層膜の残留応力評価,
第52回X線材料強度に関するシンポジウム講演論文集, 67-70, Jul. 2018.
2.Yusuke Kashiwagi and Kazuya Kusaka :
ポリイミドフィルム上に堆積した銅薄膜の回折弾性定数の基板温度および膜厚依存性,
日本材料学会第67期学術講演会講演論文集, 197-198, May 2018.
3.Kenta Shirasaka, Mikiya Fukuda, Kazuya Kusaka, Daisuke Yonekura and Yuta Tanaka :
AIP法によりTi合金及びAl合金基板上に堆積させたCrN単層膜及びCr/CrN多層膜の内部応力測定,
日本材料学会第67期学術講演会講演論文集, 199-200, May 2018.
4.Satoshi Nakai, Yuka Inoue, Kazuya Kusaka, Daisuke Yonekura and 田中 勇太 :
Cr/CrN多層膜を被覆したチタン合金のエロージョン特性,
日本材料学会第67期学術講演会講演論文集, 180-181, May 2018.
5.Kazuyoshi Kitaoka, Junko Kanai, Kazuya Kusaka, Satoshi Orita, Kenji Terada and Shoichiro Fujisawa :
イノベーション教育のための全学組織「創新教育センター」の設置と今後の展望,
イノベーション教育学会第5回年次大会, Nov. 2017.
6.Junko Kanai, Kazuya Kusaka, Takafumi Inoue, Tomohiro Kubo, Mikito Yasuzawa, Kenji Terada and Shoichiro Fujisawa :
社会人基礎力育成に向けたプロジェクトマネジメント教育の効果,
平成29年電気学会電子・情報・システム部門大会講演論文集, 355-358, Sep. 2017.
7.Junko Kanai, Emi Morimoto, Takafumi Inoue, Chizuru Sasaki, Kazuyoshi Kitaoka, Kazuya Kusaka, Hiroyuki Ukida, Toshihiro Okamoto, Yutaka Kishimoto, Yoshihiro Deguchi, Tomohiro Kubo, Mikito Yasuzawa, Kenji Terada and Shoichiro Fujisawa :
学生の自己能力評価アンケート調査からみたイノベーション教育の課題,
大学教育カンファレンスin徳島, Dec. 2016.
8.Kazuya Kusaka, Mai Onishi, Masayuki Tsukagoshi, Mikito Yasuzawa, Nobutake Tamai and Masatake Akutagawa :
Approach of practice of planning and designing for solving real problems in the region,
第63回工学教育研究講演会講演論文集, 2A06_1-2, Sep. 2015.
9.Kazuya Kusaka and Yuma Yamada :
The relationship between hillock formation and initial residual stress of copper thin film with differnt grain size,
Proceedings of The 46th Symposium on X-ray Studies on Mechanical Behaviour of Materials, Jul. 2012.
10.Kazuya Kusaka and Kikuo Tominaga :
Residual stress measurement in metal interlayer of metal-ceramics functionally graded thin film,
Proceedings of The 45th Symposium on X-ray Studies on Mechanical Behaviour of Materials, 111-114, Jul. 2011.
11.Kazuya Kusaka, Koji Kusano and Shoichiro Fujisawa :
Attempt of practice divided up design and production,
平成22年度工学・工業教育研究講演会講演論文集, 182-183, Aug. 2010.
12.Kazuya Kusaka and Kikuo Tominaga :
Residual stress measurement in 2-layered aluminum nitride films deposited by two kinds of sputterings with different power supply,
Proceedings of The 44th Symposium on X-ray Studies on Mechanical Behaviour of Materials, 105-109, Jul. 2010.
13.小濱 達也, Kazuya Kusaka and Takao Hanabusa :
AIP法によって生成したTiN膜の残留応力の熱的特性,
日本材料学会第58期学術講演会, May 2009.
14.Shyouzo Tsuzuki, Takao Hanabusa and Kazuya Kusaka :
視覚的理解から操作・体得理解へ-4節リンク模型を用いた「機構学」での動機付け-,
平成20年度工学・工業教育研究講演会講演論文集, 38-39, Aug. 2008.
15.Kazuya Kusaka, Hitoshi Takagi, Daisuke Yonekura, Takuo Nagamachi and Takao Hanabusa :
Trial of practice shared in design and production works,
平成20年度工学・工業教育研究講演会 講演論文集, 66-67, Aug. 2008.
16.Mitsuhiko Shinohara, Takao Hanabusa and Kazuya Kusaka :
繰り返し曲げ付加によるCu薄膜の残留応力評価,
Proceedings of The 43rd Symposium on X-ray Studies on Mechanical Behaviour of Materials, 92-96, Jul. 2008.
17.Tatsuya Matsue, Takao Hanabusa, Kazuya Kusaka and Osami Sakata :
Residual Stresses in CrN films due to heat treatment,
Proceedings of The 43st Symposium on X-ray Studies on Mechanical Behaviour of Materials, 97-101, Jul. 2008.
18.Hirokazu Isoda, Takao Hanabusa and Kazuya Kusaka :
Effect of laser incident angle on residual stress development in laser-peened aluminum alloy,
Proceedings of The 43rd Symposium on X-ray Studies on Mechanical Behaviour of Materials, 47-52, Jul. 2008.
19.Daiki Tadashige, Takao Hanabusa, Kazuya Kusaka and Masayuki Nishida :
Measurement of residual stress in aluminum casting with large crystal by X-ray diffraction,
Proceedings of The 43st Symposium on X-ray Studies on Mechanical Behaviour of Materials, 1-6, Jul. 2008.
20.Shyouzo Tsuzuki, Takao Hanabusa, Satoshi Kiriyama and Kazuya Kusaka :
プロジェクト活動における教育的効果について,
平成19年度工学・工業教育研究講演会講演論文集, 144-145, Aug. 2007.
21.Takumi Kakuda, Takao Hanabusa and Kazuya Kusaka :
In-situ high temperature observation on the surface of copper films deposited by sputtering,
Proceedings of The 42st Symposium on X-ray Studies on Mechanical Behaviour of Materials, 156-158, Jul. 2007.
22.Kazuya Kusaka, Takao Hanabusa and Tomoyuki Kirimoto :
Stress Measurement in Cast Aluminum,
Proceedings of The 42st Symposium on X-ray Studies on Mechanical Behaviour of Materials, 93-97, Jul. 2007.
23.Kazuya Kusaka and Koji Kusano :
Trial of energy contest for initial creative subject,
平成18年度工学・工業教育研究講演会 講演論文集, 642-643, Jul. 2006.
24.Tatsuya Matsue, Takao Hanabusa, Yasukazu Ikeuchi, Kazuya Kusaka and Osami Sakata :
Alteration of internal stresses in hard coating films by synchrotron radiation due to heat treatment,
Proceedings of The 41st Symposium on X-ray Studies on Mechanical Behaviour of Materials, 40-45, Jul. 2006.
25.Kazuya Kusaka, Kenta Kaneko, Takao Hanabusa and Osami Sakata :
In-situ thermal stress measurement in multi-layered aluminum nitride and copper films by synchrotron radiation,
Proceedings of The 41st Symposium on X-ray Studies on Mechanical Behaviour of Materials, 13-18, Jul. 2006.
26.Kenta Kaneko, Kazuya Kusaka, Takao Hanabusa and Osami Sakata :
In-situ thermal stress measurement in nano-size copper thin films by synchrotron radiation,
Proceedings of The 41st Symposium on X-ray Studies on Mechanical Behaviour of Materials, 7-12, Jul. 2006.
27.Kazuya Kusaka, Takao Hanabusa and Kazumasa Miki :
Effect of Laser Focal Position and Laser Scanning Speed on Residual Stress in Laser Peened Cun Metal,
Proceedings of The 40th Symposium on X-ray Studies on Mechanical Behaviour of Materials, 107-112, Sep. 2005.
28.Satoshi Kiriyama, Kazuya Kusaka, Shingo Kuroiwa, Masanobu Haraguchi and Takao Hanabusa :
学生自主プロジェクト活動実態に関する考察,
平成17年度 工学·工業教育研究講演会講演論文集, 200-201, Sep. 2005.
29.Yasushi Kawasaki, Ikuo Shimizu, Mitsuhiko Hataya, Toshio Matsubara, Atsushi Moriai, Kazuya Kusaka and Takao Hanabusa :
Evaluation of characteristics of SPS Sintering Materials by Neutron Diffraction Method,
Proceedings of The 40th Symposium on X-ray Studies on Mechanical Behaviour of Materials, 42-47, Sep. 2005.
30.Satoshi Kiriyama, Kazuya Kusaka and Takao Hanabusa :
創成学習開発センターにおける創造性教育の取り組み,
第66回応用物理学会学術講演会講演予稿集, 332, Sep. 2005.
31.Hideaki Takai, Takao Hanabusa, Kazuya Kusaka, Tatsuya Matsue and Osami Sakata :
TiN薄膜熱応力その場測定,
日本材料学会四国支部第6期総会·学術講演会講演論文集, 45-46, Apr. 2005.
32.Yoshihiko Saeki, Kazuya Kusaka and Takao Hanabusa :
レーザピーニング処理したアルミニウム合金の残留応力分布とその評価,
日本材料学会四国支部第6期総会·学術講演会講演論文集, 43-44, Apr. 2005.
33.Kenta Kaneko, Kazuya Kusaka and Takao Hanabusa :
放射光を用いたナノサイズアルミニウム薄膜の熱応力その場測定,
日本材料学会四国支部第6期総会·学術講演会講演論文集, 39-40, Apr. 2005.
34.Yasushi Kawasaki, Mitsuhiko Hataya, Ikuo Shimizu, Toshio Matsubara, Atsushi Moriai, Takao Hanabusa and Kazuya Kusaka :
中性子回折法による金属およびセラミックスのSPS焼結材の特性評価,
日本材料学会四国支部第6期総会·学術講演会講演論文集, 37-38, Apr. 2005.
35.Kazuhiro Noda, Mitsuhiko Hataya, Takao Hanabusa, Kazuya Kusaka, Koji Oshima, Tomoyuki Ishida, Shoso Shingubara, Tatsuya Matsue and Osami Sakata :
Measurement of Electromigration-induced Strain in Fine Aluminum Line,
Proceedings of The 39th Symposium on X-ray Studies on Mechanical Behaviour of Materials, 219-223, Sep. 2004.
36.Takao Hanabusa, Kazuya Kusaka, Shoso Shingubara, Kazuhiro Noda, Tatsuya Matsue and Osami Sakata :
Thermal Stress Behavior of Aluminum Nanofilms under Heat Cycling,
Proceedings of The 39th Symposium on X-ray Studies on Mechanical Behaviour of Materials, 213-218, Sep. 2004.
37.Hideaki Takai, Takao Hanabusa, Kazuya Kusaka, Tatsuya Matsue and Osami Sakata :
The Residual Stress and Surface Property of Titanium Nitride,
Proceedings of The 39th Symposium on X-ray Studies on Mechanical Behaviour of Materials, 208-212, Sep. 2004.
38.Tatsuya Matsue, Takao Hanabusa, Yasukazu Ikeuchi, Kazuya Kusaka and Osami Sakata :
Alteration of Residual Stress in SiO2/Cu/TiN Films due to Heat Treatment,
Proceedings of The 39th Symposium on X-ray Studies on Mechanical Behaviour of Materials, 202-207, Sep. 2004.
39.Kazuya Kusaka, Takeshi Tanaka and Takao Hanabusa :
Effect of Laser Power and Scanning Speed on Residual Stress in Laser-peened Aluminum Alloy Surface,
Proceedings of The 39th Symposium on X-ray Studies on Mechanical Behaviour of Materials, 141-146, Sep. 2004.
40.Mitsuhiko Hataya, Makoto Nakagawa, Toshio Matsubara, Atsushi Moriai, Hiroshi Suzuki, Nobuaki Minakawa, Yukio Morii, Kazuya Kusaka and Takao Hanabusa :
Residual Stress Analysis of Metal/Ceramic Functionally Graded Materials,
Proceedings of The 39th Symposium on X-ray Studies on Mechanical Behaviour of Materials, 93-97, Sep. 2004.
41.Kazuya Kusaka, Takao Hanabusa, Shoso Shingubara, Tatsuya Matsue, Osami Sakata and Kazhiro Noda :
ナノサイズアルミニウム薄膜の熱応力その場測定,
日本機械学会2004年度年次大会講演論文集, Vol.1, Sep. 2004.
42.Kazuya Kusaka, Takao Hanabusa, Kazuhiro Noda, Mitsuhiko Hataya, Shoso Shingubara, Tatsuya Matsue and Osami Sakata :
放射光を用いたナノサイズアルミニウム薄膜の熱応力その場測定,
LSI配線における原子輸送·応力問題 第10回研究会予稿集, 34-35, Jul. 2004.
43.Kazuya Kusaka, Takeshi Tanaka and Takao Hanabusa :
Effect of laser power on residual stress in laser-peened aluminum alloy,
第53期 学術講演会講演論文集, 49-50, May 2004.
44.Hideaki Takai, Kazuya Kusaka, Takao Hanabusa, Tatsuya Matsue and Osami Sakata :
ナノサイズ窒化チタン薄膜の残留応力測定および表面特性,
日本材料学会四国支部第5期総会·学術講演会講演論文集, 7-8, Apr. 2004.
45.Mitsuhiko Hataya, Kazuhiro Noda, Kazuya Kusaka, Kikuo Tominaga, Takao Hanabusa, Tatsuya Matsue and Osami Sakata :
ナノサイズCu薄膜の残留応力測定,
日本材料学会四国支部第5期総会·学術講演会講演論文集, 5-6, Apr. 2004.
46.Mitsuhiko Hataya, Makoto Nakagawa, Toshio Matsubara, Atsushi Moriai, Hiroshi Suzuki, Nobuaki Minakawa, Yukio Morii, Kazuya Kusaka and Takao Hanabusa :
金属/セラミックス系傾斜機能材料の内部残留応力測定,
日本材料学会四国支部第5期総会·学術講演会講演論文集, 1-2, Apr. 2004.
47.Kazuhiro Noda, Takao Hanabusa, Kazuya Kusaka, Osami Sakata, Toshiki Sato and Tatsuya Matsue :
放射光およびX線を用いたTiN薄膜の残留応力測定および表面観察,
第47回 日本学術会議材料研究連合講演会講演論文集, 303-304, Oct. 2003.
48.Mitsuhiko Hataya, Makoto Nakagawa, Toshio Matsubara, Atsushi Moriai, Yukio Morii, Kazuya Kusaka and Takao Hanabusa :
Al-Al2O3系焼結複合材料の中性子回折法による内部残留応力分布評価,
第47回 日本学術会議材料研究連合講演会講演論文集, 295-296, Oct. 2003.
49.Kazuya Kusaka, Keitaro Horikawa, Akira Oyama and Hitoshi Takagi :
Technique to Evaluate Each Student in Groups, --- A trial for Machine Creation Laboratory ---,
平成15年度工学·工業教育研究講演会講演論文集, 623-624, Sep. 2003.
50.Hitoshi Takagi, Kazuya Kusaka, Takao Hanabusa and Hiroshi Kawakami :
Trial of task inquiring class named "Find Its Root",
平成15年度工学·工業教育研究講演会講演論文集, 417-418, Sep. 2003.
51.Akira Oyama, Hitoshi Takagi, Kazuya Kusaka and Keitaro Horikawa :
Lego Mindstormsを利用した創造的ものづくり教育とその効果,
平成15年度工学·工業教育研究講演会講演論文集, 455-458, Sep. 2003.
52.Kazuya Kusaka, Keitaro Horikawa, Akira Oyama and Hitoshi Takagi :
Evaluation of personal records in a group,
日本機械学会2003年度年次大会講演論文集, Vol.V, 203-204, Aug. 2003.
53.Hitoshi Takagi, Kazuya Kusaka and Takao Hanabusa :
Trial of class on history of technology named "Find Its Root" and its effect,
日本機械学会2003年度年次大会講演論文集, Vol.V, 181-182, Aug. 2003.
54.Akira Oyama, Hitoshi Takagi, Kazuya Kusaka and Keitaro Horikawa :
Effective Practice of Machine Creation Laboratory Using Lego Mindstorms,
日本機械学会2003年度年次大会講演論文集, Vol.V, 201-202, Aug. 2003.
55.Kazuya Kusaka, Kikuo Tominaga and Takao Hanabusa :
GaNスパッタ膜の結晶配向性と内部応力の基盤温度依存性,
平成14年電気関係学会四国支部連合大会講演論文集, 186, Oct. 2002.
56.Takao Hanabusa, Kazuya Kusaka, Masayuki Nishida and Tatsuya Matsue :
Measurement of Crystal Orientation and Residual Stress in TiN Films by Synchrotron Radiation,
Proceedings of the 38th symposium on X-ray studies on mechanical behavior of materials, 93-98, Sep. 2002.
57.Makoto Nishiike, Takao Hanabusa and Kazuya Kusaka :
Evaluation of Laser-Peened Aluminum Surface,
Proceedings of the 38th symposium on X-ray studies on mechanical behavior of materials, 128-131, Sep. 2002.
58.Kazuya Kusaka, Noriyoshi Yamauchi, Takao Hanabusa and Kikuo Tominaga :
Residual Stress Measurement of RF Sputtered Gallium Nitride Films,
Proceedings of the 38th symposium on X-ray studies on mechanical behavior of materials, 41-46, Sep. 2002.
59.Takao Hanabusa and Kazuya Kusaka :
卒業研究のプレゼンテーション評価,
平成14年度 工学·工業教育研究講演会講演論文集, 199-202, Jul. 2002.
60.Kazuya Kusaka, Akira Oyama, Keitaro Horikawa and Hitoshi Takagi :
Lego Mindstormsを使った創成型教育の実施と評価,
平成14年度 工学·工業教育研究講演会講演論文集, 371-374, Jul. 2002.
61.Kazuya Kusaka, Noriyoshi Yamauchi, Takao Hanabusa and Kikuo Tominaga :
スパッタリング生成した単結晶ガリウム膜の残留応力測定,
第51期 学術講演会講演論文集, 235-236, May 2002.
62.Makoto Nishiike, Takao Hanabusa and Kazuya Kusaka :
レーザーピーニング処理した炭素鋼の残留応力測定,
第51期 学術講演会講演論文集, 225-226, May 2002.
63.Kikuo Tominaga, Takuya Kikuma, Kazuya Kusaka and Takao Hanabusa :
ZrO2膜作製における高速酸素発生とZrターゲット面酸化機構モデル,
第49回応用物理学関係連合講演会, Vol.2, 635, Mar. 2002.
64.Kikuo Tominaga, 喜久間 拓也, Kazuya Kusaka, Takao Hanabusa and Takashi Mukai :
プレーナマグネトロンスパッタリング法によるサファイヤ基板上へのGaN膜の作製,
第49回応用物理学関係連合講演会, Vol.2, 597, Mar. 2002.
65.Kazuya Kusaka, Kouhei Furutani, Takuya Kikuma, Takao Hanabusa and Kikuo Tominaga :
Effect of Plasma Protection Net on Crystal Orientation and Residual Stress in Sputtering GaN Films,
Proceedings of the 37th symposium on X-ray studies on mechanical behavior of materials, 175-179, Sep. 2001.
66.Kazuya Kusaka, Daisuke Taniguchi, Takao Hanabusa and Kikuo Tominaga :
Crystal Orientation and Residual Stress in AlN Films Deposited by DC and RF Sputtering,
Proceedings of the 37th symposium on X-ray studies on mechanical behavior of materials, 170-174, Sep. 2001.
67.Makoto Nishiike, Takao Hanabusa and Kazuya Kusaka :
レーザーピーニング処理したアルミニウム表面の残留応力評価,
第50期 学術講演会講演論文集, 405-406, May 2001.
68.Kazuya Kusaka and Takao Hanabusa :
AIP法で作製した窒化クロム膜の優先配向性と残留応力評価,
第50期 学術講演会講演論文集, 401-402, May 2001.
69.Kikuo Tominaga, 喜久間 拓也, 古谷 公平, Kazuya Kusaka, Takao Hanabusa and Takashi Mukai :
プレーナマグネトロンスパッタリング法によるGaN膜の作製,
平成12年電気関係学会四国支部連合大会講演論文集, 188, Oct. 2000.
70.Kazuya Kusaka, Hironori Mitsumura, Kouhei Furutani, Takao Hanabusa and Shiro Sakai :
Residual Stress Measurement of Single Crystal GaN Film,
Proceedings of the 36th Symposium on X-ray Studies on Mechanical Behavior of Materials, 291-295, Sep. 2000.
71.Takao Hanabusa, Tadakazu Moriguchi, Kazuya Kusaka and Tatsuya Matsue :
Development of Thick TiN Film on Aluminum Substrate and Its Wear Properties,
Proceedings of the 36th symposium on X-ray studies on mechanical behavior of materials, 54-58, Sep. 2000.
72.Daisuke Taniguchi, Kazuya Kusaka, Takao Hanabusa and Kikuo Tominaga :
Effect of Sputtering Power on Residual Stress and Crystal Orientation in AlN Films Deposited by RF and DC Sputtering,
Proceedings of the 35th symposium on X-ray studies on mechanical behavior of materials, 115-119, Sep. 1999.
73.Kazuya Kusaka, Takao Hanabusa and Kikuo Tominaga :
Effect of Film Thickness on Crystal Orientation and Residual Stress in AlN Film Deposited by DC Sputtering,
Proceedings of the 35th symposium on X-ray studies on mechanical behavior of materials, 109-114, Sep. 1999.
74.Takao Hanabusa, Kazuya Kusaka, Hiroyoshi Hosota and Kikuo Tominaga :
Residual Stress Measurement of ZnO Film Deposited by Two Facing Target Sputtering System,
Proceedings of the 34th Symposium on X-ray Studies on Mechanical Behavior of Materials, 141-145, Jul. 1998.
75.Yasuhiro Miki, Tadashi Taniguchi, Kazuya Kusaka, Takao Hanabusa and Eiji Maitani :
Mechanical Properties of TiN Films Deposited on Aluminum Substrate by Arc Ion Plating Method,
Proceedings of the 34th Symposium on X-ray Studies on Mechanical Behavior of Materials, 49-54, Jul. 1998.
76.Kazuya Kusaka, Takao Hanabusa and Kikuo Tominaga :
Effect of External Magnetic Field on c-axis Orientation and Residual Stress in AlN Films,
Proceedings of the 33th Symposium on X-ray Studies on Mechanical Behavior of Materials, 66-71, Jul. 1997.
77.Hiroyoshi Hosota, Kazuya Kusaka, Takao Hanabusa and Kikuo Tominaga :
Residual Stress Measurement in ZnO Films Deposited by Two Facing Targets Sputtering System,
Proceedings of the 33th Symposium on X-ray Studies on Mechanical Behavior of Materials, 61-65, Jul. 1997.
78.Takao Hanabusa, Kazuya Kusaka and Eiji Hanaki :
Influence of Passivating Layer on Thermal Stress Development in Aluminum Film,
Proceedings of the 33th Symposium on X-ray Studies on Mechanical Behavior of Materials, 44-49, Jul. 1997.
79.Kazuya Kusaka, Takao Hanabusa, Kikuo Tominaga and Takahiro Ao :
Residual Stress Measurement in AlN Films by Alternating Sputtering System,
Proceedings of the 32th Symposium on X-ray Studies on Mechanical Behavior of Materials, 238-243, Jul. 1996.
80.Takao Hanabusa, Masayuki Nishida and Kazuya Kusaka :
X-ray Residual Stress Measurement of Laser-sprayed Layer,
Proceedings of the 32th Symposium on X-ray Studies on Mechanical Behavior of Materials, 155-160, Jul. 1996.
81.Kazuya Kusaka, Takao Hanabusa and Kikuo Tominaga :
Effect of Plasma Prevention Net for Deposition of AlN Films by Magnetron Sputtering Method,
Proceedings of the 31th Symposium on X-ray Studies on Mechanical Behavior of Materials, 135-140, Jul. 1995.
82.Kazuya Kusaka, Eiji Hanaki, Masayuki Nishida, Fukuji Inoko and Takao Hanabusa :
Change of Residual Stress for Heat Treatment in Aluminum Films Deposited on Thermal Oxygenated Silicon Wafer,
Proceedings of the 31th Symposium on X-ray Studies on Mechanical Behavior of Materials, 129-134, Jul. 1995.
83.Kazuya Kusaka, Katsuyuki Ohta, Seiichi Nunokawa, Takao Hanabusa and Fukuji Inoko :
Al薄膜の残留応力の熱処理による変化,
日本機械学会·材料力学部門講演会論文集, Vol.B, No.940-37, 318-319, Oct. 1994.
84.Takao Hanabusa and Kazuya Kusaka :
{111}配向膜のX線的応力解析,
日本機械学会·材料力学部門講演会論文集, Vol.B, No.940-37, 316-317, Oct. 1994.
85.Kazuya Kusaka, Takao Hanabusa and Kikuo Tominaga :
Dependence of Nitrogen Gas Pressure on Residual Stress in AlN Films Deposited by Planar Magnetron Sputtering System with Unbalanced Target,
Proceedings of the 30th Symposium on X-ray Studies on Mechanical Behavior of Materials, 75-80, Jul. 1994.
86.Kazuya Kusaka, Takao Hanabusa and Kikuo Tominaga :
プレーナマグネトロンスパッタリング生成したAlN膜の結晶配向性と残留応力の窒素ガス圧依存性,
第43期学術講演会論文集, 151-152, May 1994.
87.Kazuya Kusaka, Takao Hanabusa and Kikuo Tominaga :
Influence of Plasma on Crystal Orientation and Residual Stress in AlN Films Deposited by Planar Magnetron Sputtering System,
Proceedings of the 29th Symposium on X-ray Studies on Mechanical Behavior of Materials, 63-68, Jul. 1993.
88.Takao Hanabusa, Kikuo Tominaga, Haruo Fujiwara and Kazuya Kusaka :
Dependence of Substrate Temperature on Residual Stress in AlN Films Deposited by Sputtering System,
Proceedings of the 28th Symposium on X-ray Studies on Mechanical Behavior of Materials, 93-98, Jul. 1992.

Et cetera, Workshop:

1.Shoichiro Fujisawa, Kazuya Kusaka, Kazuyoshi Kitaoka, Satoshi Orita, Junko Kanai and Kenji Terada :
Outline of "Education Center for Innovation" for nurturing innovation human resources active in the world,
The Papers of Technical Meeting on "Control", IEE Japan, Vol.CT-18, No.076, 27-30, Mar. 2018.
2.Junko Kanai, Takafumi Inoue, Kazuya Kusaka, Tomohiro Kubo, Mikito Yasuzawa, Kenji Terada and Shoichiro Fujisawa :
創成学習開発センターが支援するプロジェクトマネジメント基礎による創造性教育,
教育シンポジウム2017, Mar. 2017.
3.Junko Kanai, Emi Morimoto, Takafumi Inoue, Miki Niwa, Chizuru Sasaki, Kazuya Kusaka, Hiroyuki Ukida, Yutaka Kishimoto, Yoshihiro Deguchi, Tomohiro Kubo, Mikito Yasuzawa, Kenji Terada and Shoichiro Fujisawa :
ものづくり教育による大学生の能力向上,
電気学会研究会資料 制御研究会, No.CT-16-036, 93-95, Mar. 2016.
4.Junko Kanai, Emi Morimoto, Takafumi Inoue, Miki Niwa, Chizuru Sasaki, Kazuya Kusaka, Hiroyuki Ukida, Yutaka Kishimoto, Yoshihiro Deguchi, Tomohiro Kubo, Mikito Yasuzawa, Kenji Terada and Shoichiro Fujisawa :
徳島大学創成学習開発センターが支援する自主プロジェクト演習による創造性教育,
工学教育シンポジウム2016, Mar. 2016.
5.Kazuya Kusaka, Masachika Kijima, 大西 舞, Emi Morimoto, Masayuki Tsukagoshi, Mikito Yasuzawa, Nobutake Tamai, Masatake Akutagawa, Kenji Terada and Shoichiro Fujisawa :
導入科目「プロジェクトマネージメント基礎」における企画設計実習の取り組み,
電気学会研究会資料 制御研究会, No.CT-14-87, 25-30, Dec. 2014.
6.Kazuya Kusaka, Yohei Yamada, 大西 舞, Masayuki Tsukagoshi, Mikito Yasuzawa, Masaki GOTO, Emi Morimoto, Masatake Akutagawa, Kenji Terada and Shoichiro Fujisawa :
Enfocement and evaluation of the introductory subject "project menagement fundamentals",
電気学会研究会資料 制御研究会, Vol.CT-14, No.15, 11-16, Apr. 2014.
7.Kazuya Kusaka :
第6回残留応力に関する国際会議(ICRS-6)に出席して,
Journal of the Society of Materials Science, Japan, Vol.49, No.11, 1255, Nov. 2000.

Report:

1.Satoshi Kiriyama, Kazuya Kusaka and Takao Hanabusa :
動きはじめた創成学習―徳島大学創成学習開発センターの活動,
大学教育研究ジャーナル(徳島大学), No.2, 95-106, Tokushima, Mar. 2005.
(Tokushima University Institutional Repository: 82381)

Grants-in-Aid for Scientific Research (KAKEN Grants Database @ NII.ac.jp)

  • Deformation constraint by grain boundary observed with microscopic view point (Project/Area Number: 21560095 )
  • 微小領域にレーザピーニング処理したアルミニウム合金の内部応力評価 (Project/Area Number: 17760085 )
  • What is a controlling factor of the strength of thin films? (Project/Area Number: 17560071 )
  • In-situ system observation of thermal stress in thin films by in-lab X-ray equipment and synchrotron radiation (Project/Area Number: 14550081 )
  • スパッタリング窒化物半導体薄膜の作製とX線回折を用いた特性評価 (Project/Area Number: 11750081 )
  • Internal Stress and Atomic Transportation in Thin Film and Line Structure (Project/Area Number: 10650092 )
  • Search by Researcher Number (70274256)